We describe a test carried out by using a two-thickness interferometer to investigate the effect of the surface stress on the measurement of the silicon lattice constant.
A two thickness interferometer for lattice strain investigations / Massa, Enrico; Melis, Claudio; Sasso, Carlo Paolo; Kuetgens, Ulrich; Mana, Giovanni. - (2016), pp. 1-2. (Intervento presentato al convegno 2016 Conference on Precision Electromagnetic Measurements (CPEM 2016)) [10.1109/CPEM.2016.7540796].
A two thickness interferometer for lattice strain investigations
Massa, Enrico
;Sasso, Carlo Paolo;Mana, Giovanni
2016
Abstract
We describe a test carried out by using a two-thickness interferometer to investigate the effect of the surface stress on the measurement of the silicon lattice constant.File in questo prodotto:
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