A portable picometer reference actuator with 100 µm range, picometer resolution, subnanometer accuracy and submicroradian tip-tilt error for the characterization of measuring instruments at the nanoscale / Pisani, Marco; Giugni, Andrea. - In: METROLOGIA. - ISSN 0026-1394. - 55:4(2018), pp. 541-557. [10.1088/1681-7575/aaca6f]
A portable picometer reference actuator with 100 µm range, picometer resolution, subnanometer accuracy and submicroradian tip-tilt error for the characterization of measuring instruments at the nanoscale
Pisani, Marco
;
2018
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