A fractional error as large as 25 pm mm(-1) at the zero optical-path difference has been observed in an optical interferometer measuring the displacement of an x-ray interferometer used to determine the lattice parameter of silicon. Detailed investigations have brought to light that the error was caused by light forward-scattered from the beam feeding the interferometer. This paper reports on the impact of forward-scattered light on the accuracy of two-beam optical interferometry applied to length metrology, and supplies a model capable of explaining the observed error.
Forward scattering in two-beam laser interferometry / Mana, G; Massa, E; Sasso, C. P.. - In: METROLOGIA. - ISSN 0026-1394. - 55:2(2018), pp. 222-228. [10.1088/1681-7575/aaac4d]
Forward scattering in two-beam laser interferometry
Mana, G;Massa, E;Sasso, C. P.
2018
Abstract
A fractional error as large as 25 pm mm(-1) at the zero optical-path difference has been observed in an optical interferometer measuring the displacement of an x-ray interferometer used to determine the lattice parameter of silicon. Detailed investigations have brought to light that the error was caused by light forward-scattered from the beam feeding the interferometer. This paper reports on the impact of forward-scattered light on the accuracy of two-beam optical interferometry applied to length metrology, and supplies a model capable of explaining the observed error.| File | Dimensione | Formato | |
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