A model of a monolithic silicon LLL scanning X-ray interferometer capable of displacements up to 100 mu m is described. It can be used for the measurement of the (2 (2) over bar 0) lattice plane spacing of silicon in studies concerning the Avogadro constant and for the calibration of linear displacement transducers having sub-nanometer sensitivity.
Simulation of monolithic silicon LLL scanning X-ray interferometer / Bianc, Gb; Mana, Giovanni; Zosi, G.. - In: JAPANESE JOURNAL OF APPLIED PHYSICS. PART 2, LETTERS. - ISSN 0021-4922. - 36:8(1997), pp. 5356-5360. [10.1143/JJAP.36.5356]
Simulation of monolithic silicon LLL scanning X-ray interferometer
MANA, GIOVANNI;
1997
Abstract
A model of a monolithic silicon LLL scanning X-ray interferometer capable of displacements up to 100 mu m is described. It can be used for the measurement of the (2 (2) over bar 0) lattice plane spacing of silicon in studies concerning the Avogadro constant and for the calibration of linear displacement transducers having sub-nanometer sensitivity.File in questo prodotto:
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