An apparatus whereby silicon monocrystals, such as those used in x-ray optics, can be cut and optically polished accurately parallel to known lattice planes is described. A parallelism to within 10 mu rad has been obtained.
Optically polished surfaces parallel to the (220) lattice planes of silicon monocrystals / Bergamin, A; Cavagnero, G; Mana, Giovanni; Massa, Enrico; Zosi, G.. - In: MEASUREMENT SCIENCE & TECHNOLOGY. - ISSN 0957-0233. - 10:6(1999), pp. 549-553. [10.1088/0957-0233/10/6/321]
Optically polished surfaces parallel to the (220) lattice planes of silicon monocrystals
MANA, GIOVANNI;MASSA, ENRICO;
1999
Abstract
An apparatus whereby silicon monocrystals, such as those used in x-ray optics, can be cut and optically polished accurately parallel to known lattice planes is described. A parallelism to within 10 mu rad has been obtained.File in questo prodotto:
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