We have developed a null laser interferometer capable of picometer resolution in fringe division for the measurement of the silicon (220) lattice spacing by X-ray interferometry., With a view to achieving 10(-9) measurement uncertainty, we hale given special attention to the effects of diffraction, An analysis of the measurements which has brought to Light wavefront astigmatism? the effect of which had so far been overlooked, is presented, This article show's how astigmatism affects measurements, describes how we determine beam parameters, and compares theoretical and experimental results.
Beam-astigmatism in laser interferometry / Bergamin, A; Cavagnero, G; Cordiali, L; Mana, Giovanni. - In: IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT. - ISSN 0018-9456. - 46:2(1997), pp. 196-200. [10.1109/19.571811]
Beam-astigmatism in laser interferometry
MANA, GIOVANNI
1997
Abstract
We have developed a null laser interferometer capable of picometer resolution in fringe division for the measurement of the silicon (220) lattice spacing by X-ray interferometry., With a view to achieving 10(-9) measurement uncertainty, we hale given special attention to the effects of diffraction, An analysis of the measurements which has brought to Light wavefront astigmatism? the effect of which had so far been overlooked, is presented, This article show's how astigmatism affects measurements, describes how we determine beam parameters, and compares theoretical and experimental results.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
