Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for NMIs to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community, thereby supporting the growth in nanotechnology. Several approaches were followed in order to develop the interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers using an x-ray interferometer to generate traceable reference displacements.
Comparison of the performance of the next generation of optical interferometers / Pisani, Marco; Yacoot, A; Balling, P; Bancone, N; Birlikseven, C; Celik, M; Flueugge, J; Hamid, R; Koechert, P; Kren, P; Kuetgens, U; Lassila, A; Picotto, Gianbartolo; Sahin, E; Seppa, J; Tedaldi, M; Weichert, C.. - In: METROLOGIA. - ISSN 0026-1394. - 49:(2012), pp. 455-467. [doi:10.1088/0026-1394/49/4/455]
Comparison of the performance of the next generation of optical interferometers
PISANI, MARCO;PICOTTO, GIANBARTOLO;
2012
Abstract
Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for NMIs to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community, thereby supporting the growth in nanotechnology. Several approaches were followed in order to develop the interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers using an x-ray interferometer to generate traceable reference displacements.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
