Quantitative analysis and processing of surfaces and profiles from profilometry images

Surface metrology is concerned with inspecting morphological parameters of a surfaces or profiles, by using contact or non-contact profilometers. The following abstract describes the development of a software in Python environment that implements various processing methods on images from optical and stylus profilometers. In particular, the program focusses on image pre-processing and determination of dimensional parameters for 2D areas and 1D profiles. It is worth mentioning that many open and closed source programs are already distributed, but they do not provide a sufficient automatization in the image processing, often requiring the user to repeat the same steps for each image to obtain the expected results. The program has been initially developed within the framework of the EMPIR 20IND07 TracOptic project for the processing of a batch of topographies on RS-M and RS-N linear step samples, in order to compensate for the lack of automation for the calculation of height parameters. The developed program is designed to be modular and scalable for expanding the processing capabilities.