n this paper the development of a measurement setup for resistive films able to perform sensing tests within a wide resistance range is reported. The system is fully automated, allowing to perform time-consuming sensing tests without operator supervision. Here, a thick film planar-type sensor was investigated. Cu-doped SnO2 was used as sensing element deposited by screen printing on the planar ceramic substrate provided with Pt interdigited contacts. First results showed a predictable behavior vs. low values of humidity and a satisfactory attitude to thermal stress. The system is a promising tool both in sensing performance film evaluation and in device prototype characterization
A high resistance measurement setup for MOS sensing materials characterization / Capra, PIER PAOLO; Galliana, Flavio; M., Latino; A., Bonavita; N., Donato; G., Neri. - (2013), pp. 149-154.
A high resistance measurement setup for MOS sensing materials characterization
CAPRA, PIER PAOLO;GALLIANA, FLAVIO;
2013
Abstract
n this paper the development of a measurement setup for resistive films able to perform sensing tests within a wide resistance range is reported. The system is fully automated, allowing to perform time-consuming sensing tests without operator supervision. Here, a thick film planar-type sensor was investigated. Cu-doped SnO2 was used as sensing element deposited by screen printing on the planar ceramic substrate provided with Pt interdigited contacts. First results showed a predictable behavior vs. low values of humidity and a satisfactory attitude to thermal stress. The system is a promising tool both in sensing performance film evaluation and in device prototype characterizationI documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.
